Methodology for Electrical Characterization of MOS Devices with Alternative Gate Dielectrics

Aggressive scaling of Complementary Metal Oxide Semiconductor (CMOS) devices is driving SiO2 based gate dielectrics to its physical limits. Currently several alternative dielectric materials are being studied extensively as replacement for SiO2. This work mainly discusses charge trapping and the die...

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Bibliographic Details
Main Author: Kerber, Andreas
Format: Others
Language:English
English
English
en
Published: 2004
Online Access:https://tuprints.ulb.tu-darmstadt.de/404/1/Thesis_AK_part_1.pdf
https://tuprints.ulb.tu-darmstadt.de/404/2/Thesis_AK_part_2.pdf
https://tuprints.ulb.tu-darmstadt.de/404/3/Thesis_AK_part_3.pdf
Kerber, Andreas <http://tuprints.ulb.tu-darmstadt.de/view/person/Kerber=3AAndreas=3A=3A.html> (2004): Methodology for Electrical Characterization of MOS Devices with Alternative Gate Dielectrics.Darmstadt, Technische Universität, [Online-Edition: http://elib.tu-darmstadt.de/diss/000404 <http://elib.tu-darmstadt.de/diss/000404> <official_url>],[Ph.D. Thesis]