Oxygen Engineered Hafnium Oxide Thin Films grown by Reactive Molecular Beam Epitaxy
This study applies RMBE to grow thin films of hafnium oxide, a widely studied material which has found its way into commercialisation as a replacement of SiO2 in a field effect transistor. After investigating different substrates and probing various deposition conditions, RMBE-grown films of hafnium...
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| Format: | Others |
| Language: | English en |
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2012
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| Online Access: | https://tuprints.ulb.tu-darmstadt.de/3338/1/Dissertation%20EMH%20V48%20-%20final%20130405.pdf Hildebrandt, Erwin Matti <http://tuprints.ulb.tu-darmstadt.de/view/person/Hildebrandt=3AErwin_Matti=3A=3A.html> (2012): Oxygen Engineered Hafnium Oxide Thin Films grown by Reactive Molecular Beam Epitaxy.Darmstadt, Technische Universität, [Ph.D. Thesis] |
Internet
https://tuprints.ulb.tu-darmstadt.de/3338/1/Dissertation%20EMH%20V48%20-%20final%20130405.pdfHildebrandt, Erwin Matti <http://tuprints.ulb.tu-darmstadt.de/view/person/Hildebrandt=3AErwin_Matti=3A=3A.html> (2012): Oxygen Engineered Hafnium Oxide Thin Films grown by Reactive Molecular Beam Epitaxy.Darmstadt, Technische Universität, [Ph.D. Thesis]