Robust control for manipulation inside a scanning electron microscope

Robust control for manipulation inside a scanning electron microscope

Cette thèse étudie le problème de nano-positionnement à l'intérieur d'un microscope électronique à balayage (MEB). Pour obtenir des informations de position avec rapidité et précision, une installation dédiée composée d’un vibromètre placé à l'intérieur du MEB a été mise en œuvre. Cet...

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Bibliographic Details
Main Author:	Gaudenzi de faria, Marcelo
Other Authors:	Besançon
Language:	en
Published:	2016
Subjects:	Nano-manipulation et caractérisation Microscope électronique à balayage (MEB) Commande robuste de position Micro-pince Caractérisation des perturbations dans le MEB $H_\infty$ Observateur d'état étendu Nano-manipulation and characterization Scanning electron microscope (SEM) Robust position control Micro-gripper Disturbance characterization in SEM Extended state observer 620.5
Online Access:	http://www.theses.fr/2016BESA2068/document

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