Imagerie tridimensionnelle nanométrique de matériaux et dispositifs à semi-conducteurs par tomographie électronique

Imagerie tridimensionnelle nanométrique de matériaux et dispositifs à semi-conducteurs par tomographie électronique

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Ces travaux de doctorat concernent le développement de la tomographie électronique appliquée à la nano-caractérisation tridimensionnelle de dispositifs à semi-conducteurs et de matériaux pour la micro et la nanoélectronique. Les contributions les plus significatives de ces travaux sont (i) l'ex...

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Bibliographic Details
Main Author:	Haberfehlner, Georg
Other Authors:	Grenoble
Language:	fr
Published:	2013
Subjects:	Tomographie électronique Semi-conducteurs HAADF STEM EFTEM Nanofil Reconstruction Electron tomography Semiconductor Nanowire
Online Access:	http://www.theses.fr/2013GRENY017/document

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