Etude des transferts d'énergie lors d'interactions plasma/surface

Etude des transferts d'énergie lors d'interactions plasma/surface

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La connaissance de l’énergie transférée aux surfaces en contact avec un plasma basse pression est un paramètre clé pour le contrôle des procédés plasmas basse pression. Sa détermination permet une meilleure compréhension des mécanismes mis en jeu lors du dépôt ou la gravure de couches couches minces...

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Bibliographic Details
Main Author:	Cormier, Pierre-Antoine
Other Authors:	Orléans
Language:	fr
Published:	2012
Subjects:	Densité de flux d’énergie Pulvérisation magnétron Énergie transférée Interactions plasma/surface Energy flux density Magnetron sputtering Energy transfer Plasma/ surface interactions
Online Access:	http://www.theses.fr/2012ORLE2040/document

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