Étude d’un résonateur piézoélectrique à ondes acoustiques de volume en technologie film mince

Étude d’un résonateur piézoélectrique à ondes acoustiques de volume en technologie film mince

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Le résonateur étudié s'insère dans un projet industriel porté par NXP Semiconductors. L'objectif est la réalisation d'un résonateur MEMS RF intégrable en vue de remplacer le quartz dans certaines applications. La compatibilité du procédé de fabrication avec les technologies utilisées...

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Bibliographic Details
Main Author:	Mareschal, Olivier
Other Authors:	Paris Est
Language:	fr
Published:	2011
Subjects:	Mems Résonateur Piézoélectrique Elongation AlN Resonator Piezoelectric
Online Access:	http://www.theses.fr/2011PEST1035/document

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