The Hybrid Integration of Arsenic Trisulfide and Lithium Niobate Optical Waveguides by Magnetron Sputtering.
It is well known that thermally evaporated a-As2S3 thin films are prone to oxidation when exposed to an ambient environment. These As2O3 crystals are a major source of scattering loss in sub-micron optical integrated circuits. Magnetron sputtering a-As2S3 not only produces films that have optical pr...
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| Format: | Others |
| Language: | en_US |
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2012
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| Online Access: | http://hdl.handle.net/1969.1/ETD-TAMU-2011-05-9359 |