Design and Control of a Compact 6-Degree-of-Freedom Precision Positioner with Linux- Based Real-Time Control
This dissertation presents the design, control, and implementation of a compact highprecision multidimensional positioner. This precision-positioning system consists of a novel concentrated-field magnet matrix and a triangular single-moving part that carries three 3-phase permanent-magnet planar-lev...
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| Format: | Others |
| Language: | en_US |
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2010
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| Online Access: | http://hdl.handle.net/1969.1/ETD-TAMU-2009-08-894 http://hdl.handle.net/1969.1/ETD-TAMU-2009-08-894 |