Feedback Controlled High Frequency Electrochemical Micromachining

Microsystem and integrated circuitry components are mostly manufactured using semiconductor technologies. Fabrication using high strength metals, for demanding aerospace, mechanical, or biomedical applications, requires novel technologies which are different from those for silicon. A promising mass...

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Bibliographic Details
Main Author: Ozkeskin, Fatih Mert
Other Authors: Hung, Wayne Nguyen P.
Format: Others
Language:en_US
Published: Texas A&M University 2008
Subjects:
Online Access:http://hdl.handle.net/1969.1/86041