Development of novel high-performance six-axis magnetically levitated instruments for nanoscale applications
This dissertation presents two novel 6-axis magnetic-levitation (maglev) stages that are capable of nanoscale positioning. These stages have very simple and compact structure that is advantageous to meet requirements in the next-generation nanomanufacturing. The 6-axis motion generation is accomplis...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
Texas A&M University
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1969.1/2602 |