Lithography Hotspot Detection
The lithography process for chip manufacturing has been playing a critical role in keeping Moor's law alive. Even though the wavelength used for the process is bigger than actual device feature size, which makes it difficult to transfer layout patterns from the mask to wafer, lithographers have...
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| Format: | Others |
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PDXScholar
2017
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| Online Access: | https://pdxscholar.library.pdx.edu/open_access_etds/3781 https://pdxscholar.library.pdx.edu/cgi/viewcontent.cgi?article=4790&context=open_access_etds |