Computer simulation of the sputtering of silicon.

Computer simulation of the sputtering of silicon.

Bibliographic Details
Main Author: Smith, Gary Lloyd
Other Authors: NA
Language:en_US
Published: Monterey, California. Naval Postgraduate School 2012
Online Access:http://hdl.handle.net/10945/18055

Internet

http://hdl.handle.net/10945/18055

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