Finite element analysis of electrostatic coupled systems using geometrically nonlinear mixed assumed stress finite elements

The micro-electromechanical systems (MEMS) industry has grown incredibly fast over the past few years, due to the irresistible character and properties of MEMS. MEMS devices have been widely used in various fields such as aerospace, microelectronics, and the automobile industry. Increasing prominenc...

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Bibliographic Details
Main Author: Lai, Zhi Cheng
Other Authors: Groenwold, Albert A.
Published: University of Pretoria 2013
Subjects:
Online Access:http://hdl.handle.net/2263/24342
http://upetd.up.ac.za/thesis/available/etd-05052008-101337/