Silicide formation through diffusion barriers
Dissertation (PhD)--University of Stellenbosch, 2006. === ENGLISH ABSTRACT: The formation of Ni-, Co- and Fe-silicides through different diffusion barrier interlayers was investigated. The diffusion barrier layers examined were Ta, Ti and Cr. In some cases the thickness of the barrier layer and the...
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Format: | Others |
Language: | en_ZA |
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Stellenbosch : University of Stellenbosch
2011
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Online Access: | http://hdl.handle.net/10019.1/17321 |