Silicide formation through diffusion barriers

Dissertation (PhD)--University of Stellenbosch, 2006. === ENGLISH ABSTRACT: The formation of Ni-, Co- and Fe-silicides through different diffusion barrier interlayers was investigated. The diffusion barrier layers examined were Ta, Ti and Cr. In some cases the thickness of the barrier layer and the...

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Bibliographic Details
Main Author: Balde, Maryna
Other Authors: Pretorius, R.
Format: Others
Language:en_ZA
Published: Stellenbosch : University of Stellenbosch 2011
Subjects:
Online Access:http://hdl.handle.net/10019.1/17321