Nano-Processing with Gas Cluster Ion Beams
学位授与年月日: 1999-03-23 ; 学位の種類: 新制・課程博士 ; 学位記番号: 1823 === In this thesis, fundamental properties of gas cluster ion beams and their non-linear irradiation effects are studied. Applications in the fabrication of nano-structures (nano-processes) are demonstrated, as based on knowledge of the interactions...
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| Format: | Others |
| Language: | English |
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Kyoto University
2006
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| Online Access: | http://hdl.handle.net/2433/8951 |