IONIZED CLUSTER BEAM TECHNIQUES: Formation of Cluster Beams by Vaporized Solid Materials and Their Applications to Film Depositions
Kyoto University (京都大学) === 0048 === 新制・課程博士 === 工学博士 === 甲第3986号 === 工博第996号 === 新制||工||714(附属図書館) === UT51-63-J220 === (主査)教授 高木 俊宜, 教授 山田 公, 教授 川端 昭
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| Format: | Others |
| Language: | English |
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Kyoto University
2009
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| Online Access: | http://hdl.handle.net/2433/74708 |