Formation and characterization of SiC/Si heterostructures by MEVVA implantation.

Formation and characterization of SiC/Si heterostructures by MEVVA implantation.

by Chen Dihu. === "November 1999." === Thesis (Ph.D.)--Chinese University of Hong Kong, 1999. === Includes bibliographical references (p. 160-173). === Electronic reproduction. Hong Kong : Chinese University of Hong Kong, [2012] System requirements: Adobe Acrobat Reader. Available via Worl...

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Bibliographic Details
Other Authors: Chen, Dihu.
Format: Others
Language:English
Chinese
Published: 1999
Subjects:
Silicon carbide
Heterostructures
Ion implantation
Vapor-plating
Online Access:http://library.cuhk.edu.hk/record=b6073217
http://repository.lib.cuhk.edu.hk/en/item/cuhk-342882

Internet

http://library.cuhk.edu.hk/record=b6073217
http://repository.lib.cuhk.edu.hk/en/item/cuhk-342882

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