A study of cobalt silicide formed by MEVVA implantation.

A study of cobalt silicide formed by MEVVA implantation.

by Li Chi Pui. === Thesis (M.Phil.)--Chinese University of Hong Kong, 1999. === Includes bibliographical references (leaves [105]-[109]). === Abstracts in English and Chinese. === Abstract === Acknowledgement --- p.Page no === Chapter Chapter 1. --- Introduction === Chapter 1.1 --- Metal silicides...

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Bibliographic Details
Other Authors: Li, Chi Pui.
Format: Others
Language:English
Chinese
Published: 1999
Subjects:
Silicides
Cobalt
Ion implantation
Vapor-plating
Transition metal compounds
Annealing of metals
Online Access:http://library.cuhk.edu.hk/record=b5890087
http://repository.lib.cuhk.edu.hk/en/item/cuhk-322904

Internet

http://library.cuhk.edu.hk/record=b5890087
http://repository.lib.cuhk.edu.hk/en/item/cuhk-322904

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