IC Spatial Variation Modeling: Algorithms and Applications
Rapidly improving the yield of today's complicated manufacturing process is a key challenge to ensure profitability for the IC industry. In this thesis, we propose accurate and efficient modeling techniques for spatial variation, which is becoming increasing important in the advanced technology...
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| Format: | Others |
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Research Showcase @ CMU
2012
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| Online Access: | http://repository.cmu.edu/dissertations/136 http://repository.cmu.edu/cgi/viewcontent.cgi?article=1140&context=dissertations |