Laser nano-ablation for humidity detection
Nano-scale fabrication of technical materials is one of the biggest challenges in future industrial applications. There is a growing need for components with feature sizes below one micron. The well-established techniques, including e-beam lithography and focused ion beam milling, suffer several lim...
Main Author: | |
---|---|
Other Authors: | |
Published: |
Imperial College London
2018
|
Subjects: | |
Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.762136 |