Laser nano-ablation for humidity detection

Nano-scale fabrication of technical materials is one of the biggest challenges in future industrial applications. There is a growing need for components with feature sizes below one micron. The well-established techniques, including e-beam lithography and focused ion beam milling, suffer several lim...

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Bibliographic Details
Main Author: Sun, Lu
Other Authors: Holmes, Andrew
Published: Imperial College London 2018
Subjects:
Online Access:https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.762136