Pulsed laser ablation of silicon : the influence of beam parameters on ablated crater morphology
Laser micromachining is one of the principal fields where the laser capability to change the material morphology is frequently applied and silicon is still the element most used in the semiconductor and photovoltaic industries despite the recent studies on new materials. Although various models repo...
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University of Birmingham
2018
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.760444 |