Microstructure and cutting performance of V-C based coatings deposited by HIPIMS/UBM
The poisoning of different target materials under Direct Current Magnetron Sputtering (DCMS) and DCMS/ High Power Impulse Magnetron Sputtering (HIPIMS) discharges, using two reactive gases, were analysed. For both discharges, in mixed Ar+CH4+N2 atmosphere, low flow processes were influenced by metha...
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Sheffield Hallam University
2017
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.741584 |