Enhanced electrodeposition for the filling of micro-vias
This thesis investigated the introduction of megasound (MS) (1MHz) acoustic technology as an enhanced agitation method of an electrolyte solution for the electrochemical deposition of copper (Cu), used in electroplating processes. The thesis, carried out at Merlin Circuit Technology Ltd, studied the...
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Heriot-Watt University
2017
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.739337 |