Dynamic simulation and modelling of chemical vapour deposition process
This thesis mainly presents the use of CFD modelling to investigate and optimise the MOCVD processes in fabrication of II-VI compounds – cadmium telluride (CdTe) and zinc oxide (ZnO). It gives insight in detailed process modelling and proves the ability of using CFD modelling, which accounts for the...
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University of Nottingham
2017
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.724783 |