A SIMS and TEM study of buried oxide layers in silicon

A SIMS and TEM study of buried oxide layers in silicon

Bibliographic Details
Main Author: Griffin, Christopher James
Published: Imperial College London 1989
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.717632

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.717632

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