Surface profile measurement using spatially dispersed short coherence interferometry
Modern manufacturing processes require better quality control of the manufactured products at a faster rate, for achieving good throughput. This is increasing the need for process-oriented precision metrology capable of providing faster inspection and yielding valuable feedback to the manufacturing...
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University of Huddersfield
2015
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.686202 |