CMOS compatible EWOD microfluidic systems

This thesis reports a CMOS compatible fabrication procedure that enables ElecroWetting On Dielectric (EWOD) technology to be post-processed on foundry technology. With driving voltages less than 15V it is believed to be the lowest reported driving voltage for any material system compatible with post...

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Bibliographic Details
Main Author: Li, Y.
Published: University of Edinburgh 2008
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.653865