Controlling dopant distributions and structures in advanced semiconductors
The suitability of silicon for micro and sub-micro electronic devices is being challenged by the aggressive and continuous downscaling of device feature size. New materials with superior qualities are continually sought-after. In this thesis, defects are examined in two sets of silicon alternate mat...
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Imperial College London
2013
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.650662 |