Surface topography of silicon microcircuits
The shrinking dimensions of silicon microcircuits have reached the point where the vertical and lateral features are comparable in size. The consequence can be seen in each aspect of the manufacture of devices. The 2D layout of the physical routing becomes a convoluted maze when put into fabrication...
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University of Edinburgh
1992
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.650474 |