Application of micromachining technology for bio-inspired and pressure sensing microsystems
The main body of this thesis focuses on the fabrication of micro-electro-mechanical (MEM) fluidic flow sensor for integration with large scale integration (LSI) neuron circuit and robot. The proposed MEM sensor consists of a) piezoresistive wheatstone bridge circuits consisting of p-type boron doped...
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University of Edinburgh
2007
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.640588 |