The application of parallel computation to process simulation for the structured design of IC fabrication processes
The ability of semiconductor process simulation to analyse the physical effects of individual fabrication steps and their interaction within an entire process has gained increasing recognition within the industry. Simulation has been applied to the synthesis of nominal operating points and has offer...
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University of Edinburgh
1992
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.640354 |