The study of sputtering by concentration modulated absorption spectroscopy and the study of internal energy effects on collision induced decomposition mass spectrometry
The measurement of the absolute concentration of sputtered neutrals from a metal Li surface and polycrystalline NaC1 target has been achieved using the technique of concentration modulated absorption spectroscopy. The dependence of the amount sputtered on the target temperature, ion energy and targe...
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Swansea University
1999
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Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.638299 |