Temperature effects in thin films of silicon oxide

The use of thin film capacitors as a component in microminiaturized electrical circuits has made it necessary to obtain a more complete understanding of the conduction mechanisms occurring in these films. Silicon oxide was chosen as the dielectric material for study and the temperature behaviour of...

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Bibliographic Details
Main Author: Morley, Alan Richard
Published: Imperial College London 1968
Subjects:
Online Access:https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.623094