Application of focused ion beam for micro-machining and controlled quantum dot formation on patterned GaAs substrate
This project is a study based on the application of focused ion beam (FIB) instrumentation, which has been widely used in fields such as electronic engineering, materials science, semiconductor technology and nanotechnology. We used a Ga+ source focused ion beam column from Orsay Physics mounted on...
Main Author: | |
---|---|
Other Authors: | |
Published: |
University of Sheffield
2013
|
Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.605390 |