Development of a micromechanical characterisation process for thin film MEMS materials and its application to electro-thermal actuators
This thesis describes a fast and inexpensive test method for the characterisation of mechanical properties, particularly Young’s modulus, of thin films. This technique is based on micro-machined beam bending, and it can be used on a wide range of materials. Firstly, laser micromachining is used to p...
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University of Cambridge
2004
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.603912 |