Diamond-like carbon for microelectromechanical systems (MEMS) applications
This work investigates Diamond-like Carbon thick and thin films for applications in Microelectromechanical systems (MEMS). As such, this work intends to combine 2 highly specialized but independent research issues. In the field of diamond and related materials, there are many types of diamond-like c...
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University of Cambridge
2005
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.597675 |