Knowledge-based engineering for the scanning electron microscope

The dissertation is an account of the author's research into the analysis, design, and implementations of knowledge-based (expert) systems for applications in the field of scanning electron microscopy. The specific tasks of interest have been fault diagnosis and instrument control. This researc...

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Bibliographic Details
Main Author: Caldwell, N. H. M.
Published: University of Cambridge 1998
Subjects:
535
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.597224