Dynamics of the plasma-surface interface in capacitively coupled radio-frequency oxygen plasmas : coupling numerical simulations with optical diagnostics
Plasma processing on industrial scale is becoming increasingly complex, demanding new strategies for process control and monitoring. Of particular interest is the energy transport in the interface region between the non-equilibrium low-pressure plasma and the surface. The individual plasma component...
| Main Author: | |
|---|---|
| Other Authors: | |
| Published: |
University of York
2013
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.589310 |