Laser-based packaging of micro-devices
In this PhD thesis the development of laser-based processes for packaging applications in microsystems technologies is investigated. Packaging is one of the major challenges in the fabrication of micro-electro-mechanical systems (MEMS) and other micro-devices. A range of bonding processes have becom...
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Heriot-Watt University
2011
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.548741 |