Fabrication, development and analysis of film bulk acoustic resonators on flexible polymer substrates
It is the focus of this project to explore the possibility of achieving Radio Fre¬quency (RF) micro-devices on flexible polymer substrates. To this end standard MEMS fabrication methods have been tailored to allow the integration of func¬tional materials and device patterning for production of RF ME...
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Cranfield University
2010
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.519003 |