Microfabrication of silicon tips for scanning probe microscopy
This thesis investigates the microfabrication of silicon tips for Scanning Probe Microscopy. First, a microfabrication process was developed to produce silicon tips over 100 um height with a sharp apex of ~10–20 nm. To prevent inadvertent contact between the substrate bearing the tip and the sample...
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University of Birmingham
2009
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.512474 |