The application of parametric excitation in an electrostatically actuated mems ring resonator

The application of parametric excitation in an electrostatically actuated mems ring resonator

Research to improve performance in resonant MEMS sensors has concentrated on novel designs, fabrication techniques, actuation and sensing mechanisms, often based on macroscale designs and phenomena which have been studied extensively. This dissertation is about one such actuation mechanism, called p...

Full description

Bibliographic Details
Main Author: Harish, Kiran Mysore
Published: University of Newcastle Upon Tyne 2009
Subjects:
629.045
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.500975
id ndltd-bl.uk-oai-ethos.bl.uk-500975
record_format oai_dc
spelling ndltd-bl.uk-oai-ethos.bl.uk-5009752015-03-20T05:02:54ZThe application of parametric excitation in an electrostatically actuated mems ring resonatorHarish, Kiran Mysore2009Research to improve performance in resonant MEMS sensors has concentrated on novel designs, fabrication techniques, actuation and sensing mechanisms, often based on macroscale designs and phenomena which have been studied extensively. This dissertation is about one such actuation mechanism, called parametric excitation, based on the phenomenon of parametric resonance, to enable performance improvement in an electrostatically actuated MEMS ring resonator modulation can be conveniently achieved using electrostatic actuation which is a widely preferred actuation mechanism for MEMS.629.045University of Newcastle Upon Tynehttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.500975Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 629.045
spellingShingle 629.045
Harish, Kiran Mysore
The application of parametric excitation in an electrostatically actuated mems ring resonator
description Research to improve performance in resonant MEMS sensors has concentrated on novel designs, fabrication techniques, actuation and sensing mechanisms, often based on macroscale designs and phenomena which have been studied extensively. This dissertation is about one such actuation mechanism, called parametric excitation, based on the phenomenon of parametric resonance, to enable performance improvement in an electrostatically actuated MEMS ring resonator modulation can be conveniently achieved using electrostatic actuation which is a widely preferred actuation mechanism for MEMS.
author Harish, Kiran Mysore
author_facet Harish, Kiran Mysore
author_sort Harish, Kiran Mysore
title The application of parametric excitation in an electrostatically actuated mems ring resonator
title_short The application of parametric excitation in an electrostatically actuated mems ring resonator
title_full The application of parametric excitation in an electrostatically actuated mems ring resonator
title_fullStr The application of parametric excitation in an electrostatically actuated mems ring resonator
title_full_unstemmed The application of parametric excitation in an electrostatically actuated mems ring resonator
title_sort application of parametric excitation in an electrostatically actuated mems ring resonator
publisher University of Newcastle Upon Tyne
publishDate 2009
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.500975
work_keys_str_mv AT harishkiranmysore theapplicationofparametricexcitationinanelectrostaticallyactuatedmemsringresonator
AT harishkiranmysore applicationofparametricexcitationinanelectrostaticallyactuatedmemsringresonator
_version_ 1716788359688355840

Similar Items