The application of parametric excitation in an electrostatically actuated mems ring resonator
Research to improve performance in resonant MEMS sensors has concentrated on novel designs, fabrication techniques, actuation and sensing mechanisms, often based on macroscale designs and phenomena which have been studied extensively. This dissertation is about one such actuation mechanism, called p...
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University of Newcastle Upon Tyne
2009
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.500975 |