Investigation of space charge neutralization effects in high-current positive ion beams
Through the experience gained during the industrial development of low energy implanters, it is commonly believed that improvements in forced space-charge neutralization are responsible for the maintenance of high currents down to an energy of about 3 keV. However, despite major improvements in plas...
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University of Salford
2008
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.494741 |