The effects of oxide growth on the distribution of impurities in silicon

The effects of oxide growth on the distribution of impurities in silicon

Bibliographic Details
Main Author: Heywood, G.
Published: Open University 1979
Subjects:
530.41
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.459033

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.459033

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