Piezoelectric thick films for microelectromechanical systems application
This thesis concerns the processing and characterization of thick PZT sol-gel films for potential applications in MEMS devices. The deposition method was spin-coating. The aim was to reduce the number of coatings in the film processing by increasing the thickness of a single coating, with the restri...
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Cranfield University
2007
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.438899 |