Tribological study of micromachined electrostatically excited micromotors

Bibliographic Details
Main Author:	Beerschwinger, Ulrich
Published:	Heriot-Watt University 1994
Subjects:	621.31042 Electronic devices & electromechanical devices
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.386464

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