Techniques and applications of very high resolution electron-beam lithography

Techniques and applications of very high resolution electron-beam lithography

Bibliographic Details
Main Author: Mackie, William Stuart
Published: University of Glasgow 1984
Subjects:
770
T Technology (General)
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372412

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372412

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