Electrical properties of high resolution doping structures

The electrical transport properties and device applications of certain high resolution doping structures in silicon are discussed in this thesis. The promise of enhanced device properties from a high resolution doping structure was envisaged through the use of doping supeelattices. These structures...

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Bibliographic Details
Main Author: Biswas, Robin Gopal
Published: University of Warwick 1992
Subjects:
Online Access:https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.332605